Server is not closed when child process not started

[chemzqm]

https://github.com/microsoft/vscode-languageserver-node/blob/main/client/src/node/main.ts#L389
https://github.com/microsoft/vscode-languageserver-node/blob/main/client/src/node/main.ts#L402
When error happened on child process start, the server created by createClientPipeTransport and createClientSocketTransport is not closed.